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(02)22369391 |
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hoyu.inc@msa.hinet.net |
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維修服務 |
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中古產品 |
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儀器資料 |
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一、Boron-doped diamond Electrodes(BDD含硼鑽石電極) StandardElectrodes on silicon(標準矽基材電極) BDD coating characteristics塗層特性 |
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二、Available shapes, sizes and substrates(規格化形狀、尺寸、基材) |
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三、Custom Electrodes on silicon(客製化矽基材電極) Different doping level and thicknesses,不同的添加濃度與厚度 Different shapes and sizes by using various specific cutting techniques.透過各種切割技術，提供不同的形狀和大小。 |
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四、Standard Electrodes on metal(標準金屬基材電極) BDD coating characteristics：BDD塗層特性 Film thickness膜厚 = 4-5μm, Boron concentration含硼量 = 2500ppm, BDD resistivity電阻率 = 15mΩ.cm. Available shapes, sizes and substrates(規格化形狀、尺寸、基材): |
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五、Custom Electrodes on metal(客製化金屬基材電極) Different doping level and thicknesses,不同的添加濃度與厚度 Different shapes and sizes.不同的形狀和大小。 |
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Thickness 塗層厚度 |
Doping level 摻合量 |
Resistivity 電阻值 |
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μm |
ppm |
at.cm-3 |
mΩ.cm |
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2-3 |
100 |
3.1019 |
500 |
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2-3 |
700 |
2.1020 |
100 |
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2-3 |
2500 |
8.1020 |
14 |
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2-3 |
5000 |
2.1021 |
4 |
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2-3 |
10000 |
3.1021 |
2 |
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p-Silicon 矽晶圓種類 |
Thickness (mm) 基材厚度 |
Size (mm) 尺寸 |
Coated side 塗層面 |
Available doping level (ppm) 含硼摻合量等級 |
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Monocrystalline 單晶 |
2 |
Rectangle長方形, 50 x 25 |
Monopolar (one) 單面 |
700 |
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Monocrystalline 單晶 |
2 |
Rectangle長方形, 50 x 25 |
Bipolar (two) 雙面 |
700 |
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Monocrystalline 單晶 |
2 |
Disc圓形, Φ100 mm |
Monopolar (one) 單面 |
100, 700, 2500, 5000, 10000 |
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Monocrystalline 單晶 |
2 |
Disc圓形, Φ100 mm |
Bipolar (two) 雙面 |
700 |
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Polycrystalline 多晶 |
1 |
Square方形, 100 x 100 |
Monopolar (one) 單面 |
100, 700, 2500, 5000, 10000 |
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Polycrystalline 多晶 |
1 |
Square方形, 100 x 100 |
Bipolar (two) 雙面 |
700 |
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Substrate基材 |
Mono- or polycristalline silicon (10-3 - 104 Ω.cm)單晶矽或多晶矽 |
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Electrode Shape形狀 |
Disc, square, rectangular tailored shapes圓形、方形或矩形剪裁 |
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External Size尺寸 |
Discs圓形 (3 to 200 mm), squares方形 (3x3 to 100x100 mm) |
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BDD Thickness塗層厚度 |
From less than 100 nm up to more than 25 μm |
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Boron concentration摻硼量 |
100-10’000 ppm |
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BDD resistivity (mΩ.cm)電阻值 |
2 - 10’000 |
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Thickness uniformity (3σ) 厚度均勻度 |
±5% (within 100 mm) |
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Grain size塗層晶粒大小 |
40 nm at 100 nm film thickness 0.5 µm at 3µm film thickness |
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DCOI（絕緣體上的金剛石塗層） (Diamond Coating On Insulator) |
Diamond coating is also available on some insulating material such as Si3N4/SiO2 金剛石塗層也可用於某些絕緣材料，如Si 3 N 4 / SiO 2 |
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Specific treatment特殊需求 |
Backside metallization Ti/Au available on request 可根據需求，提供背面特製金屬層Ti / Au |
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Substrates 基板 |
Thickness (mm) 基板厚度 |
Size (mm) 尺寸 |
Coated side 塗層面 |
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Nb or Ta |
1 |
Rectangle長方形, 50 x 25 |
Bipolar (two) 雙極雙面 |
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Nb |
1 |
Rectangle長方形, 50 x 100 |
Bipolar (two) 雙極雙面 |
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Nb |
1 |
Square方形, 100 x 100 |
Bipolar (two) 雙極雙面 |
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Nb |
1 |
Mesh平網狀, 50 x 100 |
Bipolar (two) 雙極雙面 |
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Nb |
1 |
Mesh平網狀, 100 x 100 |
Bipolar (two) 雙極雙面 |
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Substrate基材 |
Niobium, Tantalum or Tungsten(鈮，鈦或鎢) |
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Electrode Shape 電極形狀 |
Disc, rectangle, rod, mesh, grid, custom(圓形、矩形、棒狀、網格、框、其他客製形狀) |
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External Size外部尺寸 |
Custom-specific up to 400x1200mm最大平面面積：400*1200MM |
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BDD Thickness厚度 |
from 1 μm to more than 20 μm |
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Boron concentration 含硼量 |
500-10’000 ppm |
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BDD resistivity (mΩ.cm) 電阻率 |
1 - 100 |
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Thickness uniformity (3σ)厚度均勻度 |
±5% (within 100 mm) |
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Current density 目前密度 |
up to 500 mA/cm2 |
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Operating conditions 使用條件 |
Anode陽極 / Cathode陰極 / Bipolar雙極 |
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Resistance / Stability 抗性/穩定性 |
stable in harsh environment (strong acids, bases, alcohols, oils, complexing agents, aromatics, etc.),在惡劣環境下穩定（強酸，鹼，醇，油，絡合劑，芳烴等）， high temperatures, heterogeneous media, etc高溫，異種介質等 |